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Evolution Materials Company

Mixture Gas

Home 제품정보 Mixture Gas
티이엠씨는 반도체 및 디스플레이용 특수가스(Specialty Gas)를 제조하는 소재전문기업입니다.
Mixture Gas
Gas Purity Cyl Size Contents Valve Type
Excimer Laser Mix 10ppm-10% F2, HCI, Xe
BCI3, Kr, Ar in Ne Balance		 47L~49L 6,000 ~ 7,500L CGA580, CGA679,
DISS718, DISS728
F2 Mix 0.1%-20% F2 in
N2, He, Ne Balance		 47L~49L 50 kgf/cm2 CGA679, JIS22R
11BF3 Mix 1%-50% 11BF3 in
H2, He, N2		 2.3L~6.6L 1800 psi SCV Valve
SiH4 & Si2H6 Mix 10ppm-50% SiH4 or Si2H6
in N2, H2 Balance		 47L 1800 psi CGA350 DISS632
INERT Mix 10ppm-90% Inert Gas in
N2, Ar, H2, He Balance		 47L 2000 psi Customer Standard
BCI3 Mix 0.1%-10% BCI3 in
N2, He Balance		 47L 23-100 kgf/cm2 CGA660
B2H6 Mix 10ppm-30% B2H6 in
N2, H2 Balance		 47L 2000 psi CGA350
※ Package can be modified under revision according to customer’s request