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Evolution Materials Company

보유설비

Home 제품정보 보유설비
티이엠씨는 반도체 및 디스플레이용 특수가스(Specialty Gas)를 제조하는 소재전문기업입니다.
  • Rare Gas
    Ne/He Separation &
    Cryo-Purification
    Rare Gas - Ne/He Separation & Cryo - Purification
    Item
    - Ne and He
    Product
    - 6N(99.9999%) Neon
    Capacity
    - 84,000 NM3/Year
    Customer Application
    - Excimer Laser Gas Mixing
    Process Description
    - High performance PSA and Cryo-purification
    - In-Line Analysis System
    - High Safety Controlled by a Auto System
    Cylinder Capability
    - 47 L, ISO Tube
  • Rare Gas
    Excimer Mixing
    System
    Rare Gas - Excimer Mixing System
    Item
    - Excimer Laser Gases
    Product
    - ArF / ArF2 / KrF / KrF2
    - ELA(LTPS) , Medical Excimer Laser
    Capacity
    - 12,000 Cyls/Year
    Customer Application
    - Photo Lithography process, ELA(LTPS)
    Process Description
    - High Precision weight measuring system
    - High Safety Controlled by a Full Auto System
    Cylinder Capability
    - 2 L ~ 47 L
  • Rare Gas
    Xe/Kr Separation &
    Cryogenic Distillation
    Rare Gas - Xe/Kr Separation & Cryogenic Distillation
    Item
    - Xe and Kr
    Product
    - 5N Kr 8,000L in 47L cylinder
    - 4N8 Xe 150L in 2L or 10,000L in 47L cylinder
    Capacity
    - 26,400 NM3/Year
    - Kr – 24,000 NM3/Year
    - Xe – 2,400 NM3/Year
    Customer Application
    - Implantation and Etching process
    Process Description
    - Adsorption, Cryogenic distillation and Purifier
    - Trans-Filling system
    - In-Line Analysis system
    - High Safety Controlled by a Auto system
    Cylinder Capability
    - 2 L ~ 47 L
  • CO
    Adsorption and Hp
    Purification System
    CO - Adsorption and HP Purification System
    Item
    - CO (Carbon Monoxide)
    Product
    - 4N5 (99.995%)
    Capacity
    - 67,000 NM3/Year
    Customer Application
    - Implantation & Deep Etching
    Process Description
    - Adsorption and Separation system
    - In–Line Analysis System
    - High Safety Controlled by a Auto System
    Cylinder Capability
    - 47 L & 2.2L
  • COS
    Distillation System
    COS - Distillation System
    Item
    - COS (Carbonyl Sulfide)
    Product
    - 3N (99.9%)
    Capacity
    - 20 MT/Year
    Customer Application
    - Dry Etching
    Process Description
    - Low temperature Multi-Distillation System
    - High Selective Adsorption system
    - High Safety Controlled by a Auto System
    Cylinder Capability
    - 47 L
  • 11BF3
    Mixture
    11BF3 - Mixture
    Item
    - 11BF3 Pure & 11BF3 Mixture
    Product
    - 11BF3 Pure
    - 11BF3 / H2 Mixture (Per customer requests)
    Capacity
    - 6,000 cyls /Year
    Customer Application
    - Ion Implantation
    Process Description
    - Full automated PLC control system
    - SCV Valve Performance test by auto program
    Cylinder Capability
    - 2.2 L and 6.9 L
  • C4F6
    Simple Purification
    and Trans-Filling
    C4F6 - Simple Purification and Trans Filling
    Item
    - C4F6 (1,3-Butadiene)
    Product
    - 3N5 (99.95%)
    Capacity
    - 200 MT/Year
    Customer Application
    - Dry Etching
    Process Description
    - Simple purification and weight filling system
    - In–Line Analysis System
    - High Safety Controlled by a Auto System
    Cylinder Capability
    - 47 L
  • CHF3
    Distillation System
    CHF3 - Distillation System
    Item
    - CHF3 (TrifluoroMethane, R23)
    Product
    - 5N (99.999%)
    Capacity
    - 150 MT/Year
    Customer Application
    - Dry Etching
    Process Description
    - In–Line Analysis System
    - High Safety Controlled by a Auto System
    Cylinder Capability
    - 47 L
  • C3F8
    Trans-Filling
    C3F8 - Trans Filling
    Item
    - C3F8 (OctaFluoroPropane, Halocarbon 218)
    Product
    - 4N (99.99%)
    Capacity
    - 200 MT/Year
    Customer Application
    - Dry Etching
    Process Description
    - Simple purification and Trans-fill system
    - In–Line Analysis System
    - High Safety Controlled by a Auto System
    Cylinder Capability
    - 47 L
  • C4F8
    Trans-Filling
    C4F8 - Trans Filling
    Item
    - C4F8 (CycloButane, Freon C318)
    Product
    - 5N (99.999%)
    Capacity
    - 300 MT/Year
    Customer Application
    - Dry Etching
    Process Description
    - Simple purification and Trans-fill system
    - In–Line Analysis System
    - High Safety Controlled by a Auto System
    Cylinder Capability
    - 47 L

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